Title:
SUBSTRATE WITH BUILT-IN FLOW-PATH, FLOW-PATH CONTROL APPARATUS, AND FLOW-PATH CONTROL METHOD
Document Type and Number:
Japanese Patent JP2007113520
Kind Code:
A
Abstract:
To provide a substrate with a built-in flow-path, flow-path control apparatus, and flow-path control method which can accurately control a movement of fluid within the flow-path with uncomplicated constitution, small and compact size, low cost, and no generation of pressurization loss.
The substrate with the built-in flow-path, in which the flow-path is formed, has an elastic coating member formed so that it may coat an open surface of the flow-path.
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Inventors:
MIHARA MAKOTO
Application Number:
JP2005307240A
Publication Date:
May 10, 2007
Filing Date:
October 21, 2005
Export Citation:
Assignee:
JSR CORP
International Classes:
F04B43/12; F04B45/08
Attorney, Agent or Firm:
Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki