Title:
SUCKING HOLDER
Document Type and Number:
Japanese Patent JP2004314233
Kind Code:
A
Abstract:
To provide an sucking holder which protects a thin object to be sucked from being sucked into the holder even if the thin object is subjected to suction/sticking procedure, to thereby prevent warping, distortion, or destruction of the thin object to be sucked.
The sucking holder is formed of a suction pipe 3 for introducing negative pressure thereinto, and an sucking face body 4 having pores communicating with the suction pipe, for sucking the object to be sucked. The diameter of each pore is set in the range of 1 μm to 1 mm.
Inventors:
HOMITSU MASAHIRO
NOTO ATSUSHI
NOTO ATSUSHI
Application Number:
JP2003111053A
Publication Date:
November 11, 2004
Filing Date:
April 16, 2003
Export Citation:
Assignee:
MYOTOKU KK
International Classes:
B25J15/06; B65G49/06; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): B25J15/06; B65G49/06; B65G49/07; H01L21/68