Title:
SUPERCONDUCTIVE SUBSTRATE
Document Type and Number:
Japanese Patent JPH0329383
Kind Code:
A
Abstract:
PURPOSE:To obtain a stable and high-quality superconductive film structure by forming a superconductive film on a sapphire substrate through a buffer layer consisting of a metal oxide film. CONSTITUTION:A metal oxide film 2 is formed on a sapphire substrate 1 as a buffer layer for preventing reaction with the sapphire substrate 1 when forming a superconductive film 3 and the superconductive film 3 is formed on the metal oxide film 2. A chemically unstable metal oxide film 2 is sandwiched between the sapphire 1 and the superconductive film 3, thus preventing deterioration without touching ambient atmosphere. Therefore, it is possible to obtain the superconductive film 3 with stable and good structure as well as good crystallinity.
Inventors:
KIMURA TAKAAKI
YAMAWAKI HIDEKI
IKEDA KAZUTO
IHARA MASARU
YAMAWAKI HIDEKI
IKEDA KAZUTO
IHARA MASARU
Application Number:
JP16333289A
Publication Date:
February 07, 1991
Filing Date:
June 26, 1989
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C04B41/89; C01G1/00; H01B12/06; H01L39/02; (IPC1-7): C04B41/89; H01B12/06; H01L39/02
Attorney, Agent or Firm:
Sadaichi Igita
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