Title:
超臨界乾燥方法
Document Type and Number:
Japanese Patent JP3553856
Kind Code:
B2
Inventors:
Hideo Ikutsu
Application Number:
JP2000134441A
Publication Date:
August 11, 2004
Filing Date:
May 08, 2000
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
F26B7/00; C11D1/06; C11D1/82; F26B9/06; F26B21/14; H01L21/304; (IPC1-7): H01L21/304; C11D1/06; C11D1/82; F26B7/00; F26B9/06; F26B21/14
Domestic Patent References:
| JP11087306A | ||||
| JP10102088A | ||||
| JP1170026A | ||||
| JP2000010301A |
Attorney, Agent or Firm:
Masaki Yamakawa