To provide a support mechanism for a chuck table and a chuck table mechanism capable of achieving assembling so that the center of a rotating shaft of the chuck table corresponds to the rotation center of a bearing.
The support mechanism for the chuck table holding workpieces is equipped with a cylindrical fixation support member and with a cylindrical rotation support member rotatably externally fitted to the outer periphery of the cylindrical fixation support member via a bearing means and having a chuck table support part at the upper end. The bearing means comprises a first annular groove formed on the outer peripheral face of the cylindrical fixation support member, a second annular groove formed on the inner peripheral face of the cylindrical rotation support member so as to oppose to the first annular groove, and a plurality of steel balls arranged between the first and second annular grooves.
YASUDA SHINYA
IZUMI KUNIHARU
| JPS63174841A | 1988-07-19 | |||
| JP2003020686A | 2003-01-24 | |||
| JPH08320017A | 1996-12-03 | |||
| JPS5526623U | 1980-02-21 |
Sachiko Okunuki
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