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Title:
SURFACE ACOUSTIC WAVE DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2005166772
Kind Code:
A
Abstract:

To provide a surface acoustic wave device in which wire connecting reliability is assured and to provide a method of manufacturing the same.

In the surface acoustic wave device in an electronic part (e.g., a SAW device 10) housed in a package having a stem 1a in the state that a SAW element chip 110 is in a face-up state, the average roughness Ra10 of the surface of a wire bonded electrode pad 4 is set to 0.1 to 0.4 μm. Thus, the surface of the electrode pad 4 is made a relatively smooth surface, and thereby, the contact surface of a metal wire 7 with the electrode pad 4 can be secured sufficiently, and the yield at the bonding can be set to a high value of 94.5% or more. Further, the average roughness Ra10 of the surface of the electrode pad 4 is set to 0.3 μm or less, and thereby the yield of about 100% can be attained.


Inventors:
MASUKO SHINGO
MISHIMA NAOYUKI
Application Number:
JP2003401006A
Publication Date:
June 23, 2005
Filing Date:
December 01, 2003
Export Citation:
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Assignee:
FUJITSU MEDIA DEVICE KK
International Classes:
H01L23/04; H03H3/08; H03H9/145; H03H9/25; (IPC1-7): H01L23/04; H03H3/08; H03H9/145; H03H9/25
Attorney, Agent or Firm:
Shuhei Katayama