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Title:
SURFACE INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JPH09243573
Kind Code:
A
Abstract:

To efficiently enable the automatic scanning of the entire surface of a CCD camera under simple control so as to follow the change of the surface shape of an ultrahigh voltage power (CV) cable by providing a plurality of sensors measuring the spaced-apart distance to the object to be inspected of a focus state.

A CCD camera 6 is arranged in opposed relation to the surface of a CV cable 7 so as to separate a specific distance. The inspection unit 5 provided on a longitudinally moving stage 4 provided on a rail 3 in a freely movable manner consists of a centering stage 11, an annular rotary stage 12, a focus stage 13 and a slope direction rotary stage 14. The respective stages 11, 12, 13, 14 of the unit 5 are respectively moved and rotated by exclusive drive motors to be positioned so as to be controlled according to the distance to the surface of the cable 1 measured by respective sensors 15.


Inventors:
MARUKI HIROSHI
YAMANE MOTOHIRO
ABE HAJIME
Application Number:
JP5508596A
Publication Date:
September 19, 1997
Filing Date:
March 12, 1996
Export Citation:
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Assignee:
FURUKAWA ELECTRIC CO LTD
International Classes:
G01B11/30; G01N21/88; G01N21/89; G01N21/892; G01N21/952; H04N7/18; (IPC1-7): G01N21/89; G01B11/30; G01N21/88; H04N7/18
Attorney, Agent or Firm:
Koji Nagato