Title:
SURFACE INSPECTION DEVICE AND SURFACE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2012026862
Kind Code:
A
Abstract:
To provide an inspection device capable of performing surface inspection with high accuracy by sequentially emitting a plurality of light of different wavelengths to an object to be inspected by one inspection device.
The surface inspection device has at least: a plurality of light sources having a light source for emitting monochromatic light; imaging means for imaging a light irradiation place on the surface of the object to be inspected; driving means for driving the object to be inspected; and control means for controlling to make one light source of the plurality of light sources emit light when the object to be inspected is driven.
Inventors:
SEKI HIROHIKO
KOBAYASHI NOBUAKI
OHIRA AKIRA
KOBAYASHI NOBUAKI
OHIRA AKIRA
Application Number:
JP2010165605A
Publication Date:
February 09, 2012
Filing Date:
July 23, 2010
Export Citation:
Assignee:
KONICA MINOLTA BUSINESS TECH
International Classes:
G01N21/952