SURFACE ROUGHNESS/CONTOUR MEASURING INSTRUMENT

Title:

SURFACE ROUGHNESS/CONTOUR MEASURING INSTRUMENT

Document Type and Number:

Japanese Patent JP2006118911

Kind Code:

A

Abstract:

To provide a surface roughness/contour measuring instrument moving relatively a probe and a workpiece within an orthogonal XY-plane, by a relatively inexpensive constitution.

The probes 6, 7 of the surface roughness/contour measuring instrument 1 are connected to a driving part 4 for driving the probes 6, 7 along a prescribed one direction, by a connection member 8 moving the probes 6, 7 along the prescribed one direction with respect to the driving part 4.

Inventors:

YANAI NOBUYUKI
KUBOTA KAZUHIRO

Application Number:

JP2004305253A

Publication Date:

May 11, 2006

Filing Date:

October 20, 2004

Export Citation:

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