To provide a surface observing method using a scanning probe microscope which can perform a stable measurement by reducing the effect of the surface charge of a sample to the utmost.
The surface observing method using the scanning probe microscope includes the step S2 for fixing the surface of the sample being the measuring target of the scanning probe microscope and a sample stand by a conductive sample fixing implement, steps S7 and S8 for connecting a part of the surface of the sample and the conductive sample fixing implement by forming a conductive substance on the surface of the sample and the step S9 for measuring the surface characteristics of the sample. Preferably, the conductive surface is the conductive layer formed on the surface of the sample using a converged ion beam or an electron beam by a converged ion beam device and the conductive layer is vapor-deposited on the region reaching the conductive sample fixing implement from the vicinity of measuring region on the surface of the sample.
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
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