Title:
SURFACE SHAPE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2015135265
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a surface shape inspection device configured to detect both surface shape and a defect, such as a roughened surface, of a subject 10, with improved inspection accuracy.SOLUTION: A surface shape inspection device includes: a light source 2 for irradiating a surface of a subject 10 with illumination light L0 forming an optical-cutting line LL; a pair of mirrors 4, 5 arranged at both sides of the optical-cutting line LL to reflect a part of light reflected from the surface of the subject 10; imaging means 6 which receives reflected light L1, L2 coming from the optical-cutting line LL and reflected by the mirrors 4, 5, and reflected light L3 coming from the optical-cutting line LL and passing between the mirrors 4, 5, and outputs image data P1-P3 of the optical-cutting line LL; and image processing means 7 which performs predetermined image processing on the image data P1-P3.
Inventors:
NAKAMURA SHUNSUKE
Application Number:
JP2014006475A
Publication Date:
July 27, 2015
Filing Date:
January 17, 2014
Export Citation:
Assignee:
NOK CORP
International Classes:
G01B11/24
Domestic Patent References:
| JPH0989534A | 1997-04-04 | |||
| JPH07248212A | 1995-09-26 | |||
| JP2003194739A | 2003-07-09 |
Foreign References:
| WO2011070914A1 | 2011-06-16 |
Attorney, Agent or Firm:
Yoichi Nomoto
Kiriyama Dai
Kiriyama Dai