Title:
SURFACE STATE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPS6454304
Kind Code:
A
Abstract:
PURPOSE:To accurately inspect the surface state of a surface to be inspected by providing a projection optical system for detection light, a main optical system for photodetection, compensation optical systems for reflected light photodetection, and an arithmetic means, and performing inspection without reference to the inclination of a projection axis and the surface to be inspected. CONSTITUTION:A 1st optical system 100 consists of the optical system 30 for projection and main optical system 32 for photodetection, the 2nd optical system 200 consists of the optical systems 40, 42, 44, and 46 for compensation which are arranged annularly at the periphery of the optical system 30 for projection at equal intervals, and those four optical systems for compensation are provided slantingly at a specific angle theta to the projection axis of the optical system 30. Then light beams photodetected by the optical systems, 32, 40, 42, 44, and 46 are converted by photoelectric converting means 50, 52, 54, 56, and 58 into electric signals, which are summed by an adding means 60 to output a symbol indicating the surface state of the object surface 16. Further, subtracting means 62 and 64 and dividing means 66 and 68 measure the extent of the inclination of the projection axis and object surface 16.
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Inventors:
MAEDA MITSUTOSHI
SUGIYAMA SATOSHI
SUGIYAMA SATOSHI
Application Number:
JP21225587A
Publication Date:
March 01, 1989
Filing Date:
August 26, 1987
Export Citation:
Assignee:
TOYOTA CENTRAL RES & DEV
International Classes:
G01B11/30; G01N21/88; (IPC1-7): G01B11/30
Domestic Patent References:
| JPS6239381A | 1987-02-20 | |||
| JPS61140809A | 1986-06-27 |
Attorney, Agent or Firm:
Yukio Fuse
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