Title:
表面処理剤、表面処理方法及び基板表面の領域選択的製膜方法
Document Type and Number:
Japanese Patent JP7330000
Kind Code:
B2
Abstract:
A surface treatment agent including a compound represented by the following general formula (P-1) and an acid. In the formula, R1 represents a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon group; R2 and R3 each independently represents a hydrogen atom, a linear or branched alkyl group having 8 or more carbon atoms, a linear or branched fluorinated alkyl group having 8 or more carbon atoms, or an aromatic hydrocarbon groupR1—P(═O)(OR2)(OR3) (P-1).
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Inventors:
Kenji Seki
Atsushi Iioka
Namiki Takumi
Atsushi Iioka
Namiki Takumi
Application Number:
JP2019131239A
Publication Date:
August 21, 2023
Filing Date:
July 16, 2019
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
C23C16/02; C09K3/00; C23C26/00
Domestic Patent References:
| JP2019512877A | ||||
| JP2004518793A |
Foreign References:
| US20100118390 |
Other References:
Comparison of the Stability of Functionalized GaN and GaP,ChemPhysChem,2015年03月24日
Attorney, Agent or Firm:
Sumio Tanai
Masahisa Matsumoto
Ryu Miyamoto
Masato Iida
Masahisa Matsumoto
Ryu Miyamoto
Masato Iida