Title:
SYNCHRONOUS MOTOR FOR CRYOPUMP
Document Type and Number:
Japanese Patent JP3306629
Kind Code:
B2
Abstract:
PURPOSE: To drive the small helium freezer of a cryopump with the aid of a comparatively low-cost synchronous motor with the generation of vibration reduced.
CONSTITUTION: In a synchronous motor 2 with the aid of which the small helium freezer 1 of a cryopump is driven, a damper weight 20 by which vibration of the motor is absorbed is mounted on the drive shaft 7 of a motor positioned in the motor case 9 of the synchronous motor. This constitution executes insulation of variation by means of the synchronous motor 2 itself. An extension case 18 is arranged to the motor case 9 and since the damper weight 20 coupled to the drive shaft 7 is contained in the extension case, constitution is simplified and modification is facilitated. There is no trouble to pay attention to the mounting direction of the cryopump like a conventional bellows.
More Like This:
| JPS593198 | [Title of the device] Sublimation pump |
| JPS59186491 | [Title of the device] The pump case in the Clio pump |
| WO/2019/163762 | CRYOPUMP |
Inventors:
Hidetoshi Morimoto
Kenji Arasawa
Kenji Arasawa
Application Number:
JP30203491A
Publication Date:
July 24, 2002
Filing Date:
November 18, 1991
Export Citation:
Assignee:
ULVAC Cryo, Inc.
International Classes:
F04B37/08; F04B39/00; H02K5/24; H02K37/24; (IPC1-7): F04B37/08; F04B39/00; H02K5/24; H02K37/24
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)
Previous Patent: ビデオ・プロジェクション装置及び所定の大きさの複数の画素からなるビ...
Next Patent: DRIVING ELECTROLYTE FOR ALUMINUM ELECTROLYTIC CAPACITOR
Next Patent: DRIVING ELECTROLYTE FOR ALUMINUM ELECTROLYTIC CAPACITOR