Title:
タンタルチタンダブルエトキシドとその製法およびそれを用いた酸化物膜の製法
Document Type and Number:
Japanese Patent JP4159015
Kind Code:
B2
Inventors:
Hideko Kadokura
Application Number:
JP2000280950A
Publication Date:
October 01, 2008
Filing Date:
August 11, 2000
Export Citation:
Assignee:
High purity chemical research institute
International Classes:
C07C31/28; C07F7/28; C07F19/00; C23C16/40; H01L21/316
Domestic Patent References:
| JP2128460A | ||||
| JP60017177A |
Foreign References:
| WO1999064643A1 |
Attorney, Agent or Firm:
Kinoshita Shigeru
Rie Ishimura
Rie Ishimura