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Title:
TAPE STICKING AUXILIARY TOOL
Document Type and Number:
Japanese Patent JP2011049287
Kind Code:
A
Abstract:

To cause neither breakage nor a fault of a device formed on a top surface side of a plate-like body when a tape is stuck on a reverse surface of the plate-like body.

The tape sticking auxiliary tool 1 which supports the plate-like body 2 having, on a top surface, a structure region 20 where a structure is formed and an outer periphery excessive region 21 enclosing the structure region 20 when sticking the tape 3 on the reverse surface 2b of the plate-like body 2 is constituted of a support member 10 including a support surface 100 for supporting the outer peripheral excessive region 21 of the plate-like body 2 mounted with the reverse surface 2b up, and a plurality of projections 11 arranged and mounted at predetermined intervals on an outer peripheral edge of the support surface 100, wherein the support member 10 supports only the outer peripheral excessive region 21 of the plate-like body 2, and the structure region 20 is supported in the air. Further, the plurality of projections 11 restrict movement of the plate-like body 2, and prevent the tape 3 from being tightly stuck on the tape sticking auxiliary tool 1, thereby facilitating peeling of the tape 3 from the tape sticking auxiliary tool 1.


Inventors:
CHO KINEN
KOMATSU ATSUSHI
Application Number:
JP2009195441A
Publication Date:
March 10, 2011
Filing Date:
August 26, 2009
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683
Domestic Patent References:
JPS6473739A1989-03-20
JPH09314022A1997-12-09
JPH08330383A1996-12-13
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Ken Kubo