Title:
TARGET CATHODE APPARATUS
Document Type and Number:
Japanese Patent JP3400516
Kind Code:
B2
Abstract:
PURPOSE: To swiftly execute the exchange of target bodies by providing the space between the target bodies and a cooling system with a dividing diaphragm and bonding the diaphragm to the target bodies and to the cooling system respectively by separate fixing apparatus.
CONSTITUTION: In a target cathode apparatus for a cathode sputtering apparatus provided with a closed cathode structure, tow plate-shaped target bodies 1 arranged parallel with each other are fixed to the remaining target holding apparatus by claw-shaped strips 2' and 2", and the claw-shaped strip 2' is fixed so as to be able to dissociate by a screw. The whole bodies of the lower faces of the target bodies 1 are brought to contact with a dividing diaphragm 3, which is fixed to the remaining apparatus by a fixing strip 4' in the left and right of the whole target apparatus. Moreover, a pan 5 is pressed against the dividing diaphragm 3 to form a cooling passage 7, the flowing-out of a coolant is checked by a sealing member 6 in the range of the edge part of the pan 5, and the under part of the pan 5 is provided with a magnet apparatus 8. In this way, only the target bodies 1 can be removed from the apparatus 2.
Inventors:
Manfred Schumacher
Helmut Schilling
Gerhard Joos
Helmut Schilling
Gerhard Joos
Application Number:
JP471694A
Publication Date:
April 28, 2003
Filing Date:
January 20, 1994
Export Citation:
Assignee:
Applied Films Gezel Shaft Mitt Beschlenktel Haftung Und Company Comandito Gezel Shaft
International Classes:
C23C14/34; H01J37/34; (IPC1-7): C23C14/34; H01J37/34
Domestic Patent References:
| JP1298159A | ||||
| JP324265A | ||||
| JP4228565A | ||||
| JP1230770A |
Attorney, Agent or Firm:
Toshio Yano (3 outside)