Title:
TARGET FOR FORMATION OF OXIDE SUPERCONDUCTING THIN FILM AND METHOD OF PRODUCING OXIDE SUPERCONDUCTING WIRE
Document Type and Number:
Japanese Patent JP2014125666
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a target for formation of an oxide superconducting film having a split structure.SOLUTION: A target for formation of an oxide superconducting film is used to form a thin film of an oxide superconductor having a composition of REBaCuO, where RE is one or more rare earth elements, on a substrate by a laser vapor deposition method and composed of sintered bodies of a raw material mixture containing elements RE, Ba, and Cu, serves as a split type target for laser vapor deposition based on depositing atoms, molecules or fine particles produced by beam-irradiating the surface with a laser beam on a substrate to form a film on the substrate and consists of a target inner part composed of a sintered body arranged in the central part and a target outer frame part composed of one or more sintered bodies arranged so as to surround the periphery of the target inner part.
Inventors:
HIRATA WATARU
Application Number:
JP2012284700A
Publication Date:
July 07, 2014
Filing Date:
December 27, 2012
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
C23C14/24; C23C14/08; H01B13/00
Domestic Patent References:
| JP2012021210A | 2012-02-02 | |||
| JPH0953174A | 1997-02-25 | |||
| JPH05263234A | 1993-10-12 | |||
| JP2010116605A | 2010-05-27 | |||
| JPH0718430A | 1995-01-20 | |||
| JPH0266164A | 1990-03-06 | |||
| JP2007063631A | 2007-03-15 | |||
| JPH05279028A | 1993-10-26 | |||
| JP2008251720A | 2008-10-16 |
Foreign References:
| US20090075824A1 | 2009-03-19 | |||
| US20050005846A1 | 2005-01-13 |
Attorney, Agent or Firm:
Masatake Shiga
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu