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Title:
TARGET POSITION DETECTION APPARATUS FOR ROBOT, SEMICONDUCTOR DEVICE AND TARGET POSITION DETECTION METHOD
Document Type and Number:
Japanese Patent JP2012152898
Kind Code:
A
Abstract:

To provide a target position detection apparatus for a robot that can highly accurately detect the position of a target.

In a robot 22, a wrist free to move in a horizontal direction is provided at a tip end of an arm 32 free to move in three axial directions, X-axis, Y-axis and Z-axis, and the wrist includes a hand 33 as an end effector. A control means 23 stores a teaching point in a storage part 26, and controls operation of the robot 22 to move the hand 33 toward the teaching point stored in the storage part 26. This control means 23 can change a control loop gain to change a pressing force of the hand 33 to a target 46, decreases the control loop gain of a wrist axis to a value lower than a predetermined value from the neighborhood of the teaching point where at least the target 46 is present, to bring the hand 33 into contact with the target 46, captures a position of the hand 33 in contact with the target 46, and detects the position of the target 46.


Inventors:
HASHIMOTO YASUHIKO
SHIMOMURA NOBUTAKA
YAMAGUCHI TAKAO
YOSHIDA TETSUYA
Application Number:
JP2012110056A
Publication Date:
August 16, 2012
Filing Date:
May 11, 2012
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD
International Classes:
B25J13/00; B25J13/08; H01L21/677
Domestic Patent References:
JPH01255015A1989-10-11
JP2004193333A2004-07-08
JPS60238290A1985-11-27
Foreign References:
US6242879B12001-06-05
Attorney, Agent or Firm:
Keiichiro Saikyo