Title:
TEG CHIP
Document Type and Number:
Japanese Patent JPH04286142
Kind Code:
A
Abstract:
PURPOSE: To provide a TEG chip which a semiconductor device can be accurately and inexpensively evaluated.
CONSTITUTION: A TEG chip 1 has the same profile as that of a semiconductor chip for constituting a semiconductor device. The chip 1 has, in addition to the same first pad group P as a pad group of the semiconductor chip, second pad groups (p) for a TEG on parts between the first group P and TEGs 2, 3, 4 and parts among the TEGs 2, 3, 4. The selected pad of the first group P and the selected pad of the second group (p) are connected by wirings 6 as required.
Inventors:
NODA MASANORI
Application Number:
JP7471791A
Publication Date:
October 12, 1992
Filing Date:
March 14, 1991
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Masatomo Sugiura