Title:
TEMPERATURE DISTRIBUTION MEASURING METHOD AND TEMPERATURE DISTRIBUTION MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH09159543
Kind Code:
A
Abstract:
To measure the temperature distribution of a sample with high resolution.
A light irradiating device 7 irradiates with the light a sample 10 placed on an upper surface of a thin film membrane 1A formed of a conductive member. A probe 3A on the tip of a cantilever 3 formed of a conductive member different in a kind from the thin film membrane 1 scans an under surface of the thin film membrane 1A in a contact condition. A thermo- electromotive force measuring device 6 measures thermo-electromotive force generated by a temperature difference between the thin film membrane 1A and the cantilever 3.
Inventors:
SUZUKI YOSHIHIKO
NAKANO KATSUSHI
NAKANO KATSUSHI
Application Number:
JP31618895A
Publication Date:
June 20, 1997
Filing Date:
December 05, 1995
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01K7/02; G01K7/08; (IPC1-7): G01K7/02
Attorney, Agent or Firm:
Yoshio Inamoto