Title:
温度計測システム、温度計測方法及び基板処理装置
Document Type and Number:
Japanese Patent JP7236985
Kind Code:
B2
Abstract:
A temperature measurement system includes: a thickness calculating unit that calculates an optical thickness of a substrate; a rotation position detecting unit that detects rotation position information of the rotary table; a substrate specifying unit that specifies a substrate based on the rotation position information; a storage unit that stores first relationship information indicating a relationship between a temperature and a thickness associated with each substrate, and second relationship information indicating a relationship between an amount of change in temperature and an amount of change in optical thickness associated with each substrate; and a temperature calculating unit that calculates a temperature of the substrate based on the optical thickness calculated by the thickness calculating unit, the substrate specified by the substrate specifying unit, the first relationship information, and the second relationship information.
Inventors:
Ken Kobayashi
Tatsuo Matsuchi
Tatsuo Matsuchi
Application Number:
JP2019206738A
Publication Date:
March 10, 2023
Filing Date:
November 15, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01K11/125; G01B11/06; G01K5/52
Domestic Patent References:
| JP20158269A | ||||
| JP201396858A | ||||
| JP2019186409A | ||||
| JP2010127778A |
Foreign References:
| WO2018179496A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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