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Title:
TERAHERTZ CAMERA AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2013148493
Kind Code:
A
Abstract:

To realize heat radiation control with high reliability in a terahertz camera and an electronic apparatus using the terahertz camera.

A non-contact type thermal switch is employed for a terahertz camera. A supporting member including an element mounting portion and at least one arm is provided on a substrate via a cavity, and a thermal type detection element is formed on the element mounting portion. A first arm is included in the at least one arm, and a field-effect transistor having a source, a drain and a gate is provided on the first arm. An electrode in the thermal type detection element serving as a heat source is connected to one of the source and the drain, and a radiation wire is connected to the other thereof. A gate control wire is connected to the gate. When a channel is formed by control of a gate voltage, an FET serving as the thermal switch is turned on, and heat of the electrode of the thermal type detection element is radiated via the radiation wire.


Inventors:
KAMIKAWA TAKETOMI
Application Number:
JP2012009708A
Publication Date:
August 01, 2013
Filing Date:
January 20, 2012
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; G01N21/35; H01L37/02
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka