Title:
TEST HEAD
Document Type and Number:
Japanese Patent JP3030239
Kind Code:
B2
Abstract:
PURPOSE: To obtain a test head which is easy of connection to a prober and of adjustment after connection.
CONSTITUTION: A test head main body is rotatably retained by a retaining frame. A ring insert 72 is coupled with a probe head by aligning a roller of the test head main body with a positioning block 82 arranged in the ring insert 72 on a prober. After coupling, the ring insert and the probe head are built in a body and can be rotated together with a probe card 76.
More Like This:
| JP2010054271 | SEMICONDUCTOR DEVICE AND METHOD OF INSPECTING THE SAME |
| WO/2007/007658 | TESTING APPARATUS |
| JPH0495884 | SEMICONDUCTOR TEST DEVICE |
Inventors:
Tetsuya Shiraishi
Keiichi Nagakusa
Keiichi Nagakusa
Application Number:
JP27349995A
Publication Date:
April 10, 2000
Filing Date:
September 27, 1995
Export Citation:
Assignee:
Agilent Technologies, Inc.
International Classes:
G01R31/28; H01L21/66; G01R31/26; (IPC1-7): H01L21/66; G01R31/26; G01R31/28
Domestic Patent References:
| JP5175290A | ||||
| JP63299353A | ||||
| JP63301537A | ||||
| JP4273458A | ||||
| JP2119235A | ||||
| JP63114229A | ||||
| JP492639U | ||||
| JP660143U | ||||
| JP373446U | ||||
| JP3104742U | ||||
| JP60163743U |
Attorney, Agent or Firm:
Kimihisa Kato