To provide a test specimen structure and test method which an intermediate test of a built-in element can be performed on a substrate having a built-in passive element.
The serial structure of a capacitor is formed in which a via connection between the capacitor and a measuring terminal pattern required for a usual measurement becomes unnecessary. An impedance of the capacitor can be measured without the via formation process with using an upper electrode of the capacitor as a measuring terminal, then a capacity of the capacitor can be calculated. The impedance measurement and inductance calculation can be possible without the via formation process by using the structure in which the via connection of an inductor is unnecessary. Further, the inductance can be obtained utilizing a resonance with the condenser by forming a pattern consisting of the connection of the inductor with the condenser.
SHIMADA YASUSHI
SHIMAYAMA YUICHI
OTSUKA KAZUHISA
YAMAGUCHI MASANORI
MADARAME TAKESHI
MIZUSHIMA ETSUO
YAMAMOTO KAZUNORI
