To decrease the number of signal lines added to inspect contact between probes for inspection and electrodes and to decrease the number of signal lines connecting auxiliary probes and an external circuit.

A plurality of signal lines are put together into one signal line by connecting signal lines connected to respective auxiliary probes or probes for inspection through diodes to decrease the number of signal lines added to inspect contact between the probes for inspection and electrodes. A TFT panel inspection device which inspects a TFT panel 11 on a TFT substrate by supplying an inspection signal to the TFT substrate 10 and detecting a drive state is equipped with: a plurality of probes 3 for inspection coming in contact with electrodes of the TFT panel 11 and supplying the inspection signal; and a plurality of auxiliary probes 4 provided successively to the probes 3 for inspection, and output ends of the plurality of auxiliary probes 4 are connected to a common line 6 through diodes 5.