Title:
THERMOSENSITIVE FLOW SENSOR
Document Type and Number:
Japanese Patent JP3589083
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a thermosensitive flow sensor whose sensitivity is high and accuracy is high by taking into consideration the nonuniformity of the isothermal curve of the temperature distribution of a heater part in the thermosensitive flow sensor which uses a thermopile-type temperature sensor which measures the flow rate, the flow velocity or the like of a fluid.
SOLUTION: In this thermosensitive flow sensor 1, an insulating layer 3 is formed on the surface of a semiconductor substrate 2, and a heater part 11 is formed on the surface of the insulating layer. A first temperature sensor 12A is formed on the upstream side of a fluid, and a second temperature sensor 12B is formed on the downstream side while the heater part is used as the center. A gap part 4 is formed on the surface side of the semiconductor substrate so as to face a region which reaches the tip bonding part 15b of the second temperature sensor from the tip bonding part 15a of the first temperature sensor. The first and second temperature sensors are composed of a plurality of thermocouples 13A, 13B, and they are arranged in such a way that the arrangement density of the thermocouples becomes higher in the central part than in the peripheral part.
Inventors:
Shuichi Wakabayashi
Masa Sasaki
Takeshi Fujiwara
Masa Sasaki
Takeshi Fujiwara
Application Number:
JP9925499A
Publication Date:
November 17, 2004
Filing Date:
April 06, 1999
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G01P5/10; G01F1/68; G01F1/692; H01L35/32; (IPC1-7): G01F1/692
Domestic Patent References:
| JP1164061A | ||||
| JP493768A | ||||
| JP3216387Y1 |
Attorney, Agent or Firm:
Teruo Aoki
Previous Patent: SHIFT LOCK RELEASING DEVICE FOR AUTOMATIC TRANSMISSION
Next Patent: ELECTRODE WEIGHT MEASURING DEVICE FOR ARC FURNACE
Next Patent: ELECTRODE WEIGHT MEASURING DEVICE FOR ARC FURNACE