Title:
薄膜バルク音響共振器、その製造方法、フィルタ、複合電子部品および通信機器
Document Type and Number:
Japanese Patent JP4657660
Kind Code:
B2
Abstract:
To provide a thin film bulk acoustic resonator improved not to complicate a production process and to efficiently suppress a lateral propagation mode while having flexibility in design.
A thin film bulk acoustic resonator 100 includes a piezoelectric film 103, and a pair of electrodes 101, 102 between which the piezoelectric film 103 is interposed. The piezoelectric film 103 includes an outer region 104 extending outward from at least a portion of the periphery of a resonator portion composed of the pair of electrodes 101, 102 and the piezoelectric film 103. The outer region 104 includes, in at least a portion thereof, an acoustic damping region 105 for damping acoustic waves.
COPYRIGHT: (C)2005,JPO&NCIPI
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Inventors:
Keiji Onishi
Hiroyuki Nakamura
Hiroshi Nakatsuka
Takehiko Yamakawa
Hiroyuki Nakamura
Hiroshi Nakatsuka
Takehiko Yamakawa
Application Number:
JP2004260724A
Publication Date:
March 23, 2011
Filing Date:
September 08, 2004
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L41/09; H03H9/17; H01L41/18; H01L41/22; H01L41/319; H03H3/02; H03H9/02; H03H9/54; H03H9/56; H03H9/58
Domestic Patent References:
| JP2003505905A | ||||
| JP2002374144A | ||||
| JP2002372974A | ||||
| JP2002344270A | ||||
| JP2003046366A | ||||
| JP7066673A | ||||
| JP2000332570A | ||||
| JP2002223144A | ||||
| JP2001313535A | ||||
| JP6112764A |
Foreign References:
| WO2002093549A1 |
Attorney, Agent or Firm:
Shiro Ogasawara