Title:
THIN FILM TRANSISTOR AND DISPLAY USING THE SAME
Document Type and Number:
Japanese Patent JP2003007719
Kind Code:
A
Abstract:
To provide a thin film transistor, a liquid crystal display and an electroluminescent display, all superior in AC reliability.
The thin film transistor is manufactured with a lower etching rate of a gate insulation film on a source and drain regions than that of the gate insulation film on a channel region.
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Inventors:
KITAMURA KAZUKI
YAMAMOTO MUTSUMI
YAMAMOTO MUTSUMI
Application Number:
JP2001187705A
Publication Date:
January 10, 2003
Filing Date:
June 21, 2001
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02F1/1368; G09F9/30; G09F9/35; H01L21/336; H01L27/32; H01L29/786; H01L51/50; H05B33/14; H05B33/26; (IPC1-7): H01L21/336; G02F1/1368; G09F9/30; G09F9/35; H01L29/786; H05B33/14; H05B33/26
Domestic Patent References:
| JPH10173190A | 1998-06-26 | |||
| JPH08153880A | 1996-06-11 | |||
| JPH11274500A | 1999-10-08 |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)