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Title:
THIN FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY USING THE SAME
Document Type and Number:
Japanese Patent JP3878705
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To obtain a TFT wherein a gate electrode, a source electrode and a drain electrode are formed with the same layer, and to obtain a liquid crystal display using the TFT as a guard resistance preventing conduction between the gate electrode and the source or drain electrode.
SOLUTION: A floating gate electrode 4 is formed on a glass substrate 3, and a gate protective film 5 is formed on the floating gate electrode 4, moreover a semiconductor i layer 6 is formed on the gate protective film 5, and a semiconductor n layer 7 is formed on the semiconductor i layer 6, and a source and drain electrode 8 is formed on the semiconductor n layer 7, moreover a gate electrode 9 is formed on the gate protective film 5 on which the semiconductor i layer 6 is not formed.


Inventors:
Ohnawa Toshio
Kawamoto Akatsuki
Application Number:
JP8297A
Publication Date:
February 07, 2007
Filing Date:
January 06, 1997
Export Citation:
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Assignee:
Mitsubishi Electric Corporation
International Classes:
G02F1/136; H01L29/786; G02F1/1368; H01L21/336; (IPC1-7): H01L29/786; H01L21/336; G02F1/136
Domestic Patent References:
JP5211318A
JP6148688A
JP6273803A
JP9244067A
Attorney, Agent or Firm:
Masuo Oiwa
Toshihide Kodama
Takenaka Ikuo
Keigo Murakami