THIN FILM TYPE ELECTRON SOURCE AND APPLIANCE EMPLOYING IT

Title:

THIN FILM TYPE ELECTRON SOURCE AND APPLIANCE EMPLOYING IT

Document Type and Number:

Japanese Patent JP3633154

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To make deterioration of an insulating layer hardly occur by making an upper part electrode have three layer structure by sandwiching an interlayer between an interface layer and a surface layer.
SOLUTION: An upper part electrode 11 comprises three-layer thin film consisting of an interface layer 16, an interlayer 17, and a surface layer 18 and the sublimation enthalpy of the material of the layer 17 is set to be higher than that of the material of the layer 18 and to be lower than that of the material of the layer 16. Consequently, a thin film electron source which is not deteriorated even after a long time operation can be materialized. Further, by optimizing the thickness of the layer 16, high emission electric current density can be stably obtained. Moreover, in the case the demand of conductivity to the electrode 11 is moderate, the electrode 11 is constituted of two layers of the layer 16 and the layer 17 and Pt is used as the material of the layer 17 and a material having higher sublimation enthalpy than Pt is used for the layer 16, so that the same effect can be provided. An image display apparatus with high brightness and a long life and a high speed electron beam drawing apparatus can be obtained by employing this thin film electron source for the display apparatus and the electron beam drawing apparatus.

More Like This:

JP2981502	INDUSTRIAL APPLICABILITY: An electron beam generator, an image forming apparatus using the electron beam generator, and an optical signal providing apparatus.
JP2926612	INDUSTRIAL APPLICABILITY: Field emission type element, field emission type image display device, and method for driving the same.
JP2765982	[Title of Invention] Semiconductor electron emitting element and method for manufacturing the same.

Inventors:

Mutsumi Suzuki
Toshiaki Kusunoki

Application Number:

JP31450296A

Publication Date:

March 30, 2005

Filing Date:

November 26, 1996

Export Citation:

Click for automatic bibliography generation Help

Assignee:

株式会社日立製作所

International Classes:

H01J1/30; H01J1/312; H01J19/24; H01J29/04; H01J31/12; H01J37/073; (IPC1-7): H01J1/30; H01J19/24

Domestic Patent References:

JP63091925A
JP5102156A
JP5315332A
JP3230446A
JP7065710A
JP7226146A
JP7094103A

Foreign References:

WO1995020821A1

Attorney, Agent or Firm:

Yasuo Sakuta

Previous Patent: DEVELOPING DEVICE

Next Patent: AUTOMATIC TABLET MEASURING DEVICE