Title:
THIN SAMPLE PREPARATION DEVICE AND THIN SAMPLE PREPARATION METHOD
Document Type and Number:
Japanese Patent JP2013167565
Kind Code:
A
Abstract:
To provide a device and method for aiming at a specific place of a thin sample and thinning the specific place when preparing the thin sample, which is to be used for TEM observation, by an electrolytic polishing method.
A polishing surface side of a sample 8 whose one side has been polished in advance is observed by a scanning electron microscope part 22, and an electrolytic polishing device part 21 performs electrolytic polishing of the sample 8 from a side opposite to the polished surface while the scanning electron microscope part 22 observes the polished surface after determining a region to be thinned. When it is determined that the region of the sample 8 to be thinned reaches desired thickness, the electrolytic polishing is stopped.
Inventors:
SHIGESATO GENICHI
Application Number:
JP2012031637A
Publication Date:
August 29, 2013
Filing Date:
February 16, 2012
Export Citation:
Assignee:
NIPPON STEEL & SUMITOMO METAL CORP
International Classes:
G01N1/32; C25F7/00; G01N1/28; H01J37/20
Domestic Patent References:
JPH06297252A | 1994-10-25 | |||
JP2004020253A | 2004-01-22 | |||
JP2007315848A | 2007-12-06 | |||
JP2007294365A | 2007-11-08 | |||
JP2010002300A | 2010-01-07 | |||
JP2010230417A | 2010-10-14 | |||
JP2005062173A | 2005-03-10 | |||
JP2011106883A | 2011-06-02 | |||
JPH11132920A | 1999-05-21 | |||
JP2003194681A | 2003-07-09 | |||
JP2011039017A | 2011-02-24 | |||
JP2008145110A | 2008-06-26 | |||
JP2001337012A | 2001-12-07 | |||
JPH06144823A | 1994-05-24 | |||
JPH06297252A | 1994-10-25 | |||
JP2004020253A | 2004-01-22 | |||
JP2007315848A | 2007-12-06 | |||
JP2007294365A | 2007-11-08 | |||
JP2010002300A | 2010-01-07 | |||
JP2010230417A | 2010-10-14 | |||
JP2005062173A | 2005-03-10 | |||
JP2011106883A | 2011-06-02 | |||
JPH11132920A | 1999-05-21 | |||
JP2003194681A | 2003-07-09 |
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani
Tetsuo Kanamoto
Miaki Kametani