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Title:
THIN SAMPLE PREPARATION DEVICE AND THIN SAMPLE PREPARATION METHOD
Document Type and Number:
Japanese Patent JP2013167565
Kind Code:
A
Abstract:

To provide a device and method for aiming at a specific place of a thin sample and thinning the specific place when preparing the thin sample, which is to be used for TEM observation, by an electrolytic polishing method.

A polishing surface side of a sample 8 whose one side has been polished in advance is observed by a scanning electron microscope part 22, and an electrolytic polishing device part 21 performs electrolytic polishing of the sample 8 from a side opposite to the polished surface while the scanning electron microscope part 22 observes the polished surface after determining a region to be thinned. When it is determined that the region of the sample 8 to be thinned reaches desired thickness, the electrolytic polishing is stopped.


Inventors:
SHIGESATO GENICHI
Application Number:
JP2012031637A
Publication Date:
August 29, 2013
Filing Date:
February 16, 2012
Export Citation:
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Assignee:
NIPPON STEEL & SUMITOMO METAL CORP
International Classes:
G01N1/32; C25F7/00; G01N1/28; H01J37/20
Domestic Patent References:
JPH06297252A1994-10-25
JP2004020253A2004-01-22
JP2007315848A2007-12-06
JP2007294365A2007-11-08
JP2010002300A2010-01-07
JP2010230417A2010-10-14
JP2005062173A2005-03-10
JP2011106883A2011-06-02
JPH11132920A1999-05-21
JP2003194681A2003-07-09
JP2011039017A2011-02-24
JP2008145110A2008-06-26
JP2001337012A2001-12-07
JPH06144823A1994-05-24
JPH06297252A1994-10-25
JP2004020253A2004-01-22
JP2007315848A2007-12-06
JP2007294365A2007-11-08
JP2010002300A2010-01-07
JP2010230417A2010-10-14
JP2005062173A2005-03-10
JP2011106883A2011-06-02
JPH11132920A1999-05-21
JP2003194681A2003-07-09
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani



 
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