Title:
THREE-DIMENSIONAL ROUGHNESS METER
Document Type and Number:
Japanese Patent JPH04297814
Kind Code:
A
Abstract:
PURPOSE:To realize real time measurement of roughness on a surface to be measured without requiring mechanical movement by converging many light spots, obtained by splitting a flux of light having astigmatism, to a micro part on the surface to be measured. CONSTITUTION:An astigmatic 12 flux of light is diffracted 13 and split into a large number of light spots arranged regularly in matrix. The flux of light is then converged 15 and projected onto an objective surface A. The projecting flux of light varies in shape of light spot between a longitudinal ellipse, a right circle and a lateral ellipse according to the position of the objective surface A. A part of flux of light reflected on the objective surface A is further reflected on a half mirror 14a and a mirror 16 and then converted through a CCD camera 17 into an image signal. The image signal is temporarily stored in an image memory 23 and subsequently processed through a central processing unit 21. In other words, the CPU 21 calculates the distance to the light spot based on the shape of each recognized light spot and then calculates the three- dimensional roughness of the objective surface A based on the relative positional relationship between the distances of all light spots and these light spots.
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Inventors:
NAKAZAWA KAZUO
Application Number:
JP8747291A
Publication Date:
October 21, 1992
Filing Date:
March 27, 1991
Export Citation:
Assignee:
ONO SOKKI CO LTD
NAKAZAWA KAZUO
NAKAZAWA KAZUO
International Classes:
G01B11/30; G01B21/20; (IPC1-7): G01B11/30; G01B21/20
Attorney, Agent or Firm:
Hisao Kamata (1 person outside)