To provide a three-dimensional shape measuring device for measuring the three-dimensional shape of the surface of a measuring object with high precision, by projecting a sine grating on the measuring object.
In the three-dimensional shape measuring device 1000, an optical axis of a camera 36 and optical axes of projectors (31, 32, 33 and 34) for projecting the sine grating are set by giving a slight angle in a substantially orthogonal direction with respect to the projecting sine grating, and can properly set the cycle and a phase of the projecting sine grating. A phase shift method for measuring an amount of displacement of the camera optical axis direction from a plurality of images is applied by using a plurality of the gratings different in the cycle and photographing an intensity image projected, by properly shifting the phases respectively. The three-dimensional shape can be measured, by regarding phase data obtained from the grating of one cycle of them as a base, and referring to the phase data obtained from the other grating.
SHIMAKAWA KOICHI
SHIMAKAWA KOICHI
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai