Title:
三次元形状測定方法および三次元形状測定装置
Document Type and Number:
Japanese Patent JP7227604
Kind Code:
B2
Abstract:
To provide a three-dimensional shape measurement method which involves irradiating a measurement target with a measurement medium to measure a three-dimensional shape using an interference signal, and which allows for easily and quickly matching a focal position of an image sensor for the interference signal and a position of an interference fringe even after replacing an objective lens. A position of an image sensor is adjusted such that a relative position difference between a position of an interference fringe on the z-axis for an objective lens in use and a focal position of the image sensor is within a given range.
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Inventors:
Yugo Onoda
Eihiro Sato
Hasegawa Shoichi
Eihiro Sato
Hasegawa Shoichi
Application Number:
JP2019053382A
Publication Date:
February 22, 2023
Filing Date:
March 20, 2019
Export Citation:
Assignee:
Hitachi High-Tech Science Co., Ltd.
International Classes:
G02B7/00; G01B11/24; G02B21/00
Domestic Patent References:
| JP2009293925A | ||||
| JP2011197166A | ||||
| JP201594802A | ||||
| JP2018180296A |
Foreign References:
| WO2010134343A1 | ||||
| WO2019044080A1 | ||||
| WO2016158782A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Eiko Office