Title:
TIP STRUCTURE OF NOZZLE, PURGE DEVICE, AND LOAD PORT
Document Type and Number:
Japanese Patent JP2016178206
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a nozzle which can be used with a grommet type housing container and a lip type housing container.SOLUTION: A nozzle 11 has a gas circulation passage 13, which may communicate with an opening 104 provided on a bottom surface of a housing container 100 for housing a housed object, and injects or discharges a gas into/from the housing container 100 through the gas circulation passage 13 and the opening 104. In a tip structure of the nozzle 11, a contact part 19 which may contact with a contacted part 103 provided around the opening 104 is provided around the gas circulation passage 13 at an upper end part of the nozzle 11. The contact part 19 has: a flat part 19b; and protruding parts 19a, 19b protruding to the upper side relative to the flat part 19b. The flat part 19b is formed by a material softer than that of the protruding parts 19a, 19c.SELECTED DRAWING: Figure 3
Inventors:
MORIHANA TOSHIMITSU
MATSUMOTO YUKI
NATSUME MITSUO
MATSUMOTO YUKI
NATSUME MITSUO
Application Number:
JP2015057368A
Publication Date:
October 06, 2016
Filing Date:
March 20, 2015
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD
International Classes:
H01L21/677
Domestic Patent References:
| JP2016039295A | 2016-03-22 | |||
| JP2004345715A | 2004-12-09 | |||
| JP2011187539A | 2011-09-22 | |||
| JP2014036185A | 2014-02-24 |
Foreign References:
| US20150228516A1 | 2015-08-13 |
Attorney, Agent or Firm:
Kaji/Suhara Patent Office
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