Title:
【発明の名称】天井走行搬送装置
Document Type and Number:
Japanese Patent JP3375907
Kind Code:
B2
Abstract:
This invention has as an object thereof to provide an overhead-traveling carrying apparatus which is capable of inexpensively incorporating countermeasures for detecting the presence of an obstacle such as a human being or a carelessly placed object during the lowering of an object to be carried onto the load port of a semiconductor manufacturing device prior to the contact of the obstacle with the object to be carried, thereby avoiding such contact. A structure is adopted in which obstacle detecting sensors which scan the raising and lowering path between a carriage and the load port of each semiconductor manufacturing apparatus, and which detect the presence of obstacles, are provided on the carriage with attached hoist.
Inventors:
Masanao Murata
Application Number:
JP10591599A
Publication Date:
February 10, 2003
Filing Date:
April 13, 1999
Export Citation:
Assignee:
Shinko Electric Co., Ltd.
International Classes:
B61B13/06; B61B13/00; B66C15/04; G01N9/04; G06M7/00; H01J40/14; H01L21/00; (IPC1-7): B61B13/06; B66C15/04
Domestic Patent References:
| JP10167463A | ||||
| JP10203647A |
Attorney, Agent or Firm:
Masatake Shiga (6 people outside)