Title:
【発明の名称】半導体製造装置用の耐食バルブ
Document Type and Number:
Japanese Patent JPH0794713
Kind Code:
B2
Inventors:
Ryusuke Ushikoshi
Application Number:
JP6050690A
Publication Date:
October 11, 1995
Filing Date:
March 12, 1990
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
F16K7/12; C23C16/32; C23C16/50; F16K41/12; (IPC1-7): C23C16/50; C23C16/32; F16K7/12; F16K41/12
Domestic Patent References:
| JP1173846A | ||||
| JP58141377A |
Attorney, Agent or Firm:
Akio Najima (2 others)
Next Patent: MANUFACTURE OF MOS TRASNSISTOR