【発明の名称】ディジタル制御位置サーボ装置

Title:

【発明の名称】ディジタル制御位置サーボ装置

Document Type and Number:

Japanese Patent JPH0687207

Kind Code:

B2

Inventors:

Kiyokazu Okamoto
Takashi Mizutani
Zhang Takeshi

Application Number:

JP41654990A

Publication Date:

November 02, 1994

Filing Date:

December 30, 1990

Export Citation:

Assignee:

Mitutoyo Corporation
NEC

International Classes:

G05B13/02; G05B21/02; G05D3/00; G05D3/12; (IPC1-7): G05D3/12; G05B13/02; G05B21/02; G05D3/00

Attorney, Agent or Firm:

Yuji Iwahashi

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