Title:
【発明の名称】半導体素子の評価方法
Document Type and Number:
Japanese Patent JP2599485
Kind Code:
B2
Inventors:
Hiroshi Yamashita
Application Number:
JP16715390A
Publication Date:
April 09, 1997
Filing Date:
June 25, 1990
Export Citation:
Assignee:
Matsushita Electronics Industrial Co., Ltd.
International Classes:
H01L21/308; G01N1/32; G01N21/88; G01N21/956; G01R31/26; H01L21/3205; H01L21/66; H01L23/52; (IPC1-7): H01L21/66; G01N1/32; G01N21/88; G01R31/26; H01L21/3205
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)