Title:
【発明の名称】高効率金属膜ゲッター素子及びその製造方法
Document Type and Number:
Japanese Patent JP3336344
Kind Code:
B2
Abstract:
A getter-filter composite membrane element, comprising a sinterable getter material and a sinterable metal filter material, the composite element defining a matrix of substantially interconnected pores. Membrane elements may be comprised of at least three alternating layers of a first sinterable getter material layer and a second sinterable metal filter material layer, the first getter layer being located between the second filter layers, the second layers acting to hold the getter layer, and to retain the getter particles. Also disclosed is a method of making the getter-filter element.
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Inventors:
Snow, James Tee.
Plante, Walter
Zeller, Robert S.
Plante, Walter
Zeller, Robert S.
Application Number:
JP50256796A
Publication Date:
October 21, 2002
Filing Date:
June 20, 1995
Export Citation:
Assignee:
MILLIPORE CORPORATION
International Classes:
B01D39/20; B01D53/22; B01D53/46; B01D71/02; B22F3/10; B22F7/00; B22F7/02; H01J7/18; (IPC1-7): B01D71/02; B01D39/20; B22F3/10; B22F7/02
Domestic Patent References:
| JP436409A | ||||
| JP1270918A | ||||
| JP563421B2 | ||||
| JP537599B2 |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)