PURPOSE: To improve adhesion strength of a conductive film on a color filter substrate having a transparent electrode and to improve fine processing characteristics (patterning characteristics) of the conductive film by using a silicon oxide film containing carbon as an intermediate film.
CONSTITUTION: A color filter 2 comprising a resin with dispersion of a pigment is formed to 5μm thickness on a transparent glass substrate 1 by printing, and further, a resin protective layer 3 is formed by applying an acryl resin to 3μm thickness by a roll coating method. After a mixture gas (Ar/O2) is introduced and its flow amt. is controlled to obtain 3×10-3Torr pressure, a silicon oxide film containing carbon is formed to 100nm thickness as an intermediate film 5 by a DC magnetron sputtering method using a SiC target at 200°C substrate temp. Further, a transparent conductive film 4 of ITO is formed to 250nm thickness by a magnetron sputtering method.
MATSUMOTO KIYOSHI
HARADA HIRONOBU
