Title:
【発明の名称】多層膜素子
Document Type and Number:
Japanese Patent JP2719018
Kind Code:
B2
Inventors:
Yuka Yamada
Katsuhiko Muto
Katsuhiko Muto
Application Number:
JP34074289A
Publication Date:
February 25, 1998
Filing Date:
December 29, 1989
Export Citation:
Assignee:
Matsushita Giken Co., Ltd.
International Classes:
G02B5/28; C23C16/06; G21K1/06; (IPC1-7): G21K1/06
Domestic Patent References:
| JP607400A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)