AQUEOUS WASHING APPARATUS

Title:

AQUEOUS WASHING APPARATUS

Document Type and Number:

Japanese Patent JPH0780453

Kind Code:

A

Abstract:

PURPOSE: To prevent the lowering of washing capacity and to reduce operation cost.

CONSTITUTION: An aq. washing apparatus has at least a washing tank A washing a product to be washed with an aq. washing soln., an oil-water separator B separating an oil component from the used washing soln. taken out of the washing tank A, a waste soln. recovery device D discarding the separated oil component and a recovery and reutilization device E recovering the used washing soln. after separation to reutilize the same and is equipped with a washing soln. heater C heating the used washing soln. to predetermined temp. By this constitution, the recovery and regeneration efficiency of the washing soln. is enhanced and the water and detergent used in washing are conserved and operation cost can be reduced. Further, water saving and the removal of chlorofluorocarbon become possible.

Inventors:

TAKEUCHI NORIKO

Application Number:

JP22461593A

Publication Date:

March 28, 1995

Filing Date:

September 09, 1993

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

B08B3/14; C02F1/40; H01J9/38; H01L21/00; H01L21/02; H05K3/26; (IPC1-7): C02F1/40; B08B3/14; H01J9/38; H01L21/00; H05K3/26

Attorney, Agent or Firm:

Kenjiro Take

Next Patent: TREATMENT OF WATER USING THERMAL REGENERATION TYPE ION EXCHANGE RESIN