Title:
【発明の名称】フォトレジスト剥離剤
Document Type and Number:
Japanese Patent JP3372903
Kind Code:
B2
Inventors:
Charles Kyle
Tat cho
Tat cho
Application Number:
JP17347599A
Publication Date:
February 04, 2003
Filing Date:
June 21, 1999
Export Citation:
Assignee:
Nichigo-Morton Co., Ltd.
International Classes:
H01L21/027; C09D9/00; C09D201/00; C11D7/32; C11D7/50; C11D7/60; C11D17/00; G03F7/42; (IPC1-7): G03F7/42; C09D9/00; C09D201/00; C11D7/32; C11D7/50; C11D7/60; C11D17/00; H01L21/027
Domestic Patent References:
| JP9319098A | ||||
| JP728254A | ||||
| JP7271057A | ||||
| JP7120937A | ||||
| JP1152588A |