Title:
【発明の名称】プラズマイオン化質量分析計
Document Type and Number:
Japanese Patent JP2753265
Kind Code:
B2
Abstract:
Disclosed is a plasma ion source mass spectrometer comprising an ion source in which a sample to be detected is ionized in plasma and a mass spectrometer which mass-separates and detects the ionized sample supplied from the ion source, characterized in that there is provided a gas introduction means for introducing into a region before the mass spectrometer a gas containing particles which can bring about a charge transfer reaction with background ions contained in particles supplied from the ion source or a gas containing particles which can bring about an energy transfer reaction with excited molecule contained in the particles supplied from the ion source. By providing such gas introduction means, background ions or excited molecule can be efficiently quenched and enhancement of sensitivity of plasma ion source mass spectrometer can be attained.
Inventors:
MITSUI YASUHIRO
SHIMURA SOJI
KOMODA TSUTOMU
SHIMURA SOJI
KOMODA TSUTOMU
Application Number:
JP14170488A
Publication Date:
May 18, 1998
Filing Date:
June 10, 1988
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
H01J37/317; H01J49/10; H01J49/12; H01J49/26; G01N27/62; (IPC1-7): H01J49/10; G01N27/62; H01J49/26
Domestic Patent References:
| JP59217936A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)