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Patent Searching and Data


Title:
CONTINUOUS VACUUM DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JPH07102375
Kind Code:
A
Abstract:

PURPOSE: To swiftly remove away deposits of a film raw material with good responsibility and good heating efficiency by arranging sticking preventing sheets constituted of many strip-like resistance heating zones in such a manner that an evaporating crucible for continuously vapor-depositing a fused material onto a strip is surrounded.

CONSTITUTION: In a vapor depositing chamber 3 of a vacuum chamber, a fused material 5 housed in an evaporating crucible 4 is heated and evaporated by an electron beam 7 from an electron gun 8 and is vapor-deposited onto the surface of a strip continuously passed through. In the continuous vacuum depositing device, sticking preventing sheets 9 constituted of many strip-like resistance heating bands 10 are arranged so as to surround the evaporating crucible 4. This resistance heating bands 10 are assembled obliquely in such a manner that the edges are overlapped via insulating materials (not shown in fig.) so that heat insulating sheets 8 shall not be seen from the evaporating crucible 4, and they are wired in series and are connected to a power source 12. A film raw material deposited on the sticking preventing sheets 9 are swiftly melted away by heating electrically the resistance heating bands 10 directly and is recovered into the evaporating crucible 4. Moreover, it is possible, in the process of the vapor depositing operation, to heat electrically the resistance heating bands 10 always or intermittently and to prevent the deposition.


Inventors:
OGURA SHIGEKI
Application Number:
JP24960493A
Publication Date:
April 18, 1995
Filing Date:
October 05, 1993
Export Citation:
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Assignee:
NIPPON STEEL CORP
International Classes:
C23C14/56; (IPC1-7): C23C14/56
Attorney, Agent or Firm:
Hiroaki Tamura (1 outside)