Title:
【発明の名称】移送装置
Document Type and Number:
Japanese Patent JP2819182
Kind Code:
B2
Abstract:
A conveyor system used in semiconductor manufacturing line, etc. including guide rails which guide workpieces in one direction and a pair of magazine stackers for workpieces installed at both ends of the workpiece guide rails and has magazine guide rails, in which the workpiece guide rails and magazine guide rails are movable in a direction perpendicular to a workpiece feed direction and are connected via a connecting assembly so that the workpiece guide rails and magazine guide rails are moved together.
Inventors:
Hiroki Yuki
Application Number:
JP11590690A
Publication Date:
October 30, 1998
Filing Date:
May 07, 1990
Export Citation:
Assignee:
Shinkawa Co., Ltd.
International Classes:
B65G1/07; B65G1/00; B65G1/02; B65G21/20; B65G25/00; B65G47/52; B65G60/00; H01L21/50; H01L21/52; H01L21/677; (IPC1-7): B65G21/20; H01L21/50; H01L21/52
Domestic Patent References:
| JP59172731A |
Attorney, Agent or Firm:
Yoshinori Tanabe