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Patent Searching and Data


Title:
RESISTANCE VALUE MEASURING PROBE FOR LASER TRIMMING
Document Type and Number:
Japanese Patent JPS6040964
Kind Code:
A
Abstract:

PURPOSE: To reduce the beam path obstacle of laser beam, by providing such a structure that a contact pin for the electrical continuity with the electrode part of a resistor is erected on a transparent insulating base plate pervious to laser beam and wiring is performed to a transparent film conductor pervious to laser beam.

CONSTITUTION: In trimming a film resistance base plate 13 having a resistor 11 and an electrode part 12 formed thereto, a transparent insulating base plate 14 easily transmitting laser beam is used and holes are provided to the base plate 14 at the positions corresponding to the electrode part 12 while contact pins 15 having springiness are planted to the holes in an upright state. In the next step, the pins and external connection terminals 16 are connected by transparent thin film conductors transmissive to laser beam, for example, a thin film pattern 17 formed of indium oxide to which about 5wt% of tin is added. By using thus constituted resistance value measuring probe, the resistor 11 can be trimmed and the beam path obstacle of laser beam can be reduced because laser beam 18 is transmitted even if the conductor 17 is present on the beam path of said beam 18.


Inventors:
EZAKI SHIROU
KASAI NORIO
TAMURA SHIGETAKA
Application Number:
JP14905483A
Publication Date:
March 04, 1985
Filing Date:
August 15, 1983
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
G01R27/02; G01R27/08; H01C17/22; H01C17/242; (IPC1-7): G01R27/08; H01C17/22
Attorney, Agent or Firm:
Takehiko Suzue