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Title:
【発明の名称】化学増幅型レジスト及びその製造方法、並びにパターン形成方法及び露光シミュレーション方法
Document Type and Number:
Japanese Patent JP2971434
Kind Code:
B2
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Inventors:
NAKAZAWA HIROSUKE
Application Number:
JP6980998A
Publication Date:
November 08, 1999
Filing Date:
March 19, 1998
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
G03F7/038; G03F7/004; G03F7/039; G03F7/26; H01L21/027; (IPC1-7): G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
JP9329895A
JP451243A
JP2296250A
JP10186343A
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)



 
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